Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8151222 | Journal of Crystal Growth | 2014 | 28 Pages |
Abstract
We observed the growth of the Ga0.80In0.20N (2Â nm)/GaN (3Â nm) superlattice (SL) structure by in situ X-ray diffraction (XRD) monitoring. The satellite peaks from the â1st to the +1st order can be obtained from these in situ XRD spectrums. From the full width at half maximums (FWHMs) of the 0th and â1st satellite peaks as a function of the SL periods, we observed a clear trend in each FWHM. It was found that by analyzing this trend along with florescence microscopic and transmission electron microscopic analysis, an analysis of the In segregation and misfit dislocation are possible. Accordingly, if we employ in situ XRD under various growth conditions, the optimization of the growth conditions will become easier because it would be possible to determine the number of periods at which In segregation and misfit dislocation increases by only one growth procedure.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Taiji Yamamoto, Daisuke Iida, Yasunari Kondo, Mihoko Sowa, Shinya Umeda, Motoaki Iwaya, Tetsuya Takeuchi, Satoshi Kamiyama, Isamu Akasaki,