| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8151596 | Journal of Crystal Growth | 2014 | 4 Pages |
Abstract
Support information of large scare SEM images of different micro-array after ICP etching
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang,