| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8166262 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2018 | 6 Pages |
Abstract
In this research, a spatial electron beam scanning is reported. There are various methods for ion and electron beam scanning. The best known of these methods is the wire scanning wherein the parameters of beam are measured by one or more conductive wires. This article suggests a novel method for e-beam scanning without the previous errors of old wire scanning. In this method, the techniques of atomic physics are applied so that a knife edge has a scanner role and the wires have detector roles. It will determine the 2D e-beam profile readily when the positions of the scanner and detectors are specified.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
M. Askarbioki, M.B. Zarandi, S. Khakshournia, S.P. Shirmardi, M. Sharifian,