Article ID Journal Published Year Pages File Type
8172303 Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2015 9 Pages PDF
Abstract
We show that a standard Linac configuration (consisting of accelerating sections, linearizing section, and magnetic chicane compressor) currently used in drivers for single-pass EUV/x-ray FELs is compatible with energy recovery, provided that certain timing constraints are met. By circulating the spent, rather than the fresh beam as in a conventional high-power ERL FEL design, the beam brightness can be more easily preserved thus facilitating lasing at short wavelength. As in a conventional ERL, the proposed design allows for energy-spread compression, enabling low-energy beam dumping and high energy-recovery efficiency. Results from numerical simulations presented in this paper show that this configuration could, in principle, support the generation of multi-kW average radiation power required for high-volume production EUV lithography.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Instrumentation
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