Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8172303 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2015 | 9 Pages |
Abstract
We show that a standard Linac configuration (consisting of accelerating sections, linearizing section, and magnetic chicane compressor) currently used in drivers for single-pass EUV/x-ray FELs is compatible with energy recovery, provided that certain timing constraints are met. By circulating the spent, rather than the fresh beam as in a conventional high-power ERL FEL design, the beam brightness can be more easily preserved thus facilitating lasing at short wavelength. As in a conventional ERL, the proposed design allows for energy-spread compression, enabling low-energy beam dumping and high energy-recovery efficiency. Results from numerical simulations presented in this paper show that this configuration could, in principle, support the generation of multi-kW average radiation power required for high-volume production EUV lithography.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
M. Venturini, G. Penn,