Article ID Journal Published Year Pages File Type
8174857 Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2014 7 Pages PDF
Abstract
This paper proposes a fast new technique for restoring scanning electron microscope images to improve their sharpness. The images with our approach are sharpened by deconvolution with the point spread function modeled as the intensity distribution of the electron beam at the specimen׳s surface. We propose an iterative technique that employs a modified cost function based on the Richardson-Lucy method to achieve faster processing. The empirical results indicate significant improvements in image quality. The proposed approach speeds up deconvolution by about 10-50 times faster than that with the conventional Richardson-Lucy method.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Instrumentation
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