| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8175578 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2014 | 4 Pages |
Abstract
Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Cinzia Da Vià ,