| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8175895 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2014 | 9 Pages |
Abstract
RBS/Channeling experiments using PSD were performed on several crystalline samples, showing that this setup seems suitable for lattice location studies, particularly for heavy ions implantation (Dâ³1015at/cm2) on light substrates like Si, SiC, and AlN.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
P.A. Miranda, U. Wahl, N. Catarino, M. Ribeiro da Silva, E. Alves,