Developing a CCD camera with high spatial resolution for RIXS in the soft X-ray range

Using the PolLux soft X-ray microspectroscopy endstation at the Swiss Light Source, a beam of X-rays of energies from 200 eV to 1400 eV can be focused down to a spot size of approximately 20 nm. Scanning this spot across the 16 µm square pixels allows the sub-pixel response to be investigated. Previous work has demonstrated the potential improvement in spatial resolution achievable by centroiding events in a standard CCD. An Electron-Multiplying CCD (EM-CCD) has been used to improve the signal to effective readout noise ratio achieved resulting in a worst-case spatial resolution measurement of 4.5±0.2 μm and 3.9±0.1 μm at 530 eV and 680 eV respectively. A method is described that allows the contribution of the X-ray spot size to be deconvolved from these worst-case resolution measurements, estimating the spatial resolution to be approximately 3.5 µm and 3.0 µm at 530 eV and 680 eV, well below the resolution limit of 5 µm required to improve the spectral resolution by a factor of 2.