| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8181748 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2012 | 4 Pages |
Abstract
This paper presents the results of the characterisation of a back-illuminated pixel sensor manufactured in Silicon-on-Insulator technology on a high-resistivity substrate with soft X-rays. The sensor is thinned and a low energy phosphorus implantation is performed on the back-plane. The response to X-rays from 2.12 to 8.6Â keV is evaluated with fluorescence radiation at the LBNL Advanced Light Source.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Marco Battaglia, Dario Bisello, Richard Celestre, Devis Contarato, Peter Denes, Serena Mattiazzo, Craig Tindall,