| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8208532 | Applied Radiation and Isotopes | 2018 | 15 Pages |
Abstract
A total reflection X-ray fluorescence (TXRF) spectrometer based on an elliptical monocapillary X-ray lens (MXRL) and a parallel polycapillary X-ray lens (PPXRL) was designed. This TXRF instrument has micro focal spot, low divergence and high intensity of incident X-ray beam. The diameter of the focal spot of MXRL was 16.5â¯Âµm, and the divergence of the incident X-ray beam was 3.4â¯mrad. We applied this TXRF instrument to the micro analysis of a single-layer film containing Ni deposited on a Si substrate by metal vapor vacuum arc ion source.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Radiation
Authors
Yu Zhu, Yabing Wang, Tianxi Sun, Xuepeng Sun, Xiaoyun Zhang, Zhiguo Liu, Yufei Li, Fengshou Zhang,