Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
848588 | Optik - International Journal for Light and Electron Optics | 2015 | 4 Pages |
Amorphous carbon (a-C) films were deposited by pulsed unbalanced magnetron sputtering method, the effects of substrate temperature on the structure, optical and electrical properties of the a-C films were investigated. It has been found that the sp3 fraction in the a-C films increases with increasing substrate temperature from 50 to 100 °C, while decreases with increasing substrate temperature from 100 to 200 °C. Optical and electrical measurements show that the refractive index, optical band gap and electrical resistivity are strongly dependent on the substrate temperature. The a-C films deposited at 100 °C have higher refractive index, optical band gap and electrical resistivity. The possible reason for all the above observation was discussed. The results above are useful for the practical application of a-C films.