Article ID Journal Published Year Pages File Type
848899 Optik - International Journal for Light and Electron Optics 2014 5 Pages PDF
Abstract

The smoothing efficiencies of epicyclic motion and orbital motion in CCOS (computer controlled optical surfacing) were compared. CCOS polishing can smooth out mid-to-high spatial frequency errors which are smaller than tool size on optical mirrors due to the rigidity of polishing tools. The smoothing efficiencies of epicyclic motion and orbital motion with pitch lap and RC lap were compared and the result proved pitch lap with epicyclic motion smoothed ∼1.6 times faster than pitch lap with orbital motion while RC lap with epicyclic motion smoothed ∼1.85 times faster than RC lap with orbital motion.

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