| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 849118 | Optik - International Journal for Light and Electron Optics | 2011 | 4 Pages |
Abstract
In order to enhance the accuracy of three-component seismic acceleration detection, a novel three-component micro-optoelectronic mechanical systems (MOEMS) accelerometer based on photoelastic effect has been designed. The mechanical properties of sensitive unit under three-component acceleration are analyzed theoretically and a Finite Element Analysis (FEM) simulation is performed simultaneously. Meanwhile, a Mach-Zehnder (M–Z) interferometer which is based on photoelastic effect had been designed and a Beam Propagation Method (BPM) simulation has been processed as well, experimental results indicated that the sensor had a high sensitivity, wide frequency response range and a good linearity in the range of seismic band.
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Engineering (General)
Authors
Dongling Tang, Dong Zhao, Ying Wang, Xiaodong Zhang, Zheng Liang, Feng Guo,