The thermo-optical variable optical attenuator based on SOI

A thermo-optical variable optical attenuator was studied based on silicon on insulator (SOI) substrate waveguide. It is composed by the single-mode waveguide, taper waveguide, multi-mode waveguide, and inclined electrode. By adjusting the applied voltage on the inclined electrode it can achieve continuously variable attenuation of the output light. The results we studied show that when the applied voltage is about 4.7 V (the corresponding power is 233 mW), the variation of the waveguide's core temperature is about 33 °C, the refractive index changes more than 5.0 × 10−3 and the attenuation will reach 35 dB, and the response time is only 35 μs.