Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
849841 | Optik - International Journal for Light and Electron Optics | 2014 | 5 Pages |
Abstract
We report the evaluation of the topography of an object with projected fringes generated with a lateral cyclic shear interferometer (CSI) and we then compare the topography recovery obtained with the proposed method with the one obtained from a coordinate measuring machine (CMM). We also study how the fringes visibility along the z axis affects the retrieval. Finally, we discuss the advantages and drawbacks of this profilometry system.
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Physical Sciences and Engineering
Engineering
Engineering (General)
Authors
Analia Sicardi-Segade, Amalia Martínez-García, Noel-Ivan Toto-Arellano, J.A. Rayas,