Article ID Journal Published Year Pages File Type
850532 Optik - International Journal for Light and Electron Optics 2013 4 Pages PDF
Abstract

Phase retrieval technology for off-axis ellipsoid surface measurement with a high dynamic range algorithm is proposed in this paper. A high dynamic range algorithm (HDRA) for phase retrieval is proposed. We proved the validity of it in simulation. Then the HDRA is used to measure an off-axis ellipsoid. The measurement setup was established and the HDRA was applied to retrieve the surface shape of the off-axis ellipsoid. The experimental results show that the phase retrieval results are good agreement with that obtained by interferometer, which confirms the validity of this method.

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