Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
850852 | Optik - International Journal for Light and Electron Optics | 2013 | 4 Pages |
Abstract
This letter presents the design, simulation, fabrication, and successful demonstration of a variable optical attenuator (VOA) based on a micromachined micromirror combined with an optical fiber collimator. The micromirror has a size of 500 μm in diameter and a rotational resonance of 4.94 kHz. The micromirror was actuated by vertical comb drive which was fabricated by bulk micromachining process on a silicon on insulator (SOI) wafer. The VOA operates at a low driving voltage of 4.4 V corresponding to the rotation angle of 0.3°. The turn-on and turn-off response time of the VOA are 1.6 ms and 2.74 ms, respectively. Finally, the optical attenuation was measured and an optical attenuation as large as 40 dB was obtained.
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Authors
Yingming Liu, Jing Xu, Shaolong Zhong, Leiying Zhai, Yaming Wu,