| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 851229 | Optik - International Journal for Light and Electron Optics | 2012 | 5 Pages |
Abstract
This paper describes a micro-Mach–Zehnder (M–Z) interferometer used in seismic accelerometer. To achieve high modulation efficiency and a small chip size, a deeply etched ridge waveguide structure is employed, and accordingly a multi-mode interference (MMI) coupler is used as the 1 × 4 power splitter. The result of Beam Propagation Method (BPM) simulation indicates that the phase shift is linearly corresponding to the applied acceleration.
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Authors
Dong-Lin Tang, Peng Wang, Xiao-Dong Zhang, Shan He, Liang Zhang, Bing Dai,