Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
851260 | Optik - International Journal for Light and Electron Optics | 2012 | 4 Pages |
Abstract
In spectroscopic ellipsometry (SE) measurement, accuracy of optic axis orientation is very important requirement. To reduce the error arising from the uncertainty in optic axis orientation, we applied multiple angles SE measurement performed on 6H-SiC with the optical axis perpendicular to the sample (0 0 0 1) surface in the 300–800 nm wavelength range at room temperature. The refractive indices and extinction coefficients for ordinary and extraordinary were both fitted by Cauchy dispersion model. The obtained results were of great agreement with literatures.
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Authors
Zheng Ma, Jie Lian, Qing-Pu Wang, Wen-Li Guan, Shi-Liang Wu, Shang Gao, Ping Song, Xiao Wang,