Article ID Journal Published Year Pages File Type
851621 Optik - International Journal for Light and Electron Optics 2012 5 Pages PDF
Abstract

A pair of negative-poles in microelectroremoval process is a precision nanoscale production of a reclaim system of ITO nanostructure (ITO) removal from optoelectronic flat panel displays’ color filter surface is demonstrated in the current study. The microelectroremoval just needs quite short time to make the ITO remove easily and cleanly. In the current experiment, the pair of negative-poles constructs a high efficiency in ITO removal and takes less time for the same amount of ITO removal compared with a single negative-pole. A small size of the negative-poles and a small gap-width between the negative-poles and the ITO surface takes less time for the ITO removal. Pulsed direct current is advantageous to associate with the fast feed rate of workpiece. A high rotational speed of the negative-poles or a higher concentration of the electrolyte corresponds to a higher removal rate for ITO. A fast feed rate of the displays’ color filters combined with enough electric power produces fast ITO removal. Through the ultra-precise removal of thin-film nanostructure, the optoelectronic semiconductor industry can effectively reclaim defective products, reducing production costs.

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Physical Sciences and Engineering Engineering Engineering (General)
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