| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 851673 | Optik - International Journal for Light and Electron Optics | 2011 | 5 Pages |
Abstract
In this paper, a novel method to measure straightness errors with beam bend compensation based on Finite Element thermal analysis is proposed. According to the Edlen formula, the main factor that causes beam bend is thermal gradation in the air. Finite Element thermal analysis is applied to the thermal field around the beam. It is evident from the experimental results that high precision straightness errors in horizontal and vertical directions can be obtained after compensation. Hence, the feasibility of straightness errors measuring system with compensation for beam bend measurement is proved.
Related Topics
Physical Sciences and Engineering
Engineering
Engineering (General)
Authors
Fengling You, Bin Zhang, Qibo Feng,