| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 851747 | Optik - International Journal for Light and Electron Optics | 2012 | 5 Pages |
Abstract
When an optical element is tested, the structure parameters and the surface errors of the interference system will influence the test result deeply. It is necessary to design the reasonable optical system to obtain the surface shape accurately. In this paper, the influences of the collimated lens, the imaging lens and the reference surface on the interferometric testing are analyzed, the relationship between the measurement error and system structures are built, and the optimum design is introduced to improve the test precision.
Related Topics
Physical Sciences and Engineering
Engineering
Engineering (General)
Authors
Xiaojun Cao, Yanhong Li, Qiang Lin, Jianqiang Zhu,