Measurement of phase and intensity by Dual-imaging Interferometry for performance evaluation of liquid crystal spatial light modulator

In order to evaluate the performance of liquid crystal spatial light modulator Dual-imaging Interferometry is proposed by introducing a dual-imaging system into Michelson interferometer to obtain phase and intensity for the measurement of multiple parameters. The feasibility of the proposed method is verified through theory analysis and experiments. Experimental results indicate that the range of phase shift is from 0 to 2.07π, the nonlinearity of phase shift curve is 3.02% and the RMS of phase nonuniformity is 0.07π. The rising and fall time are 13 ms and 16 ms, respectively. Dual-imaging Interferometry can be used to measure multiple parameters on one experimental setup in place of conventional methods and avoid the complicated operation and extra errors resulting from arranging different experimental setups.