Ellipsometry of anisotropic materials: A new efficient polynomial approach

Dielectric multilayer stacks can exhibit anisotropy along the normal to the substrate. We present a polynomial approach for the spectroscopic ellipsometry of anisotropic multilayer structure in the cases where the off-diagonal elements of the dielectric tensor are zero. The ellipsometric parameters ψ and Δ of a stratified anisotropic planar structure can be written in a form so simple that they can be given directly without any calculation for any number of interfaces. The variation of ψ and Δ of two simple structures with the incidence angle is shown. The numerical results reveal an exact match with the well known traditional formalism.