Effect of fabrication errors on lateral super-resolution property of a three-zone pupil filter

Two models have been established using the basic definitions of super-resolution characteristic parameters for normalized spot size GT and Strehl ratio ST of a three-zone lateral super-resolution pupil filter with fabrication errors to quantitatively analyze the effect of these fabrication errors on the lateral super-resolution property. These new models established to describe the analytic relationship of GTe and STe of a pupil filter with its fabrication errors and its transmission function A(ρ), phase function φ(ρ) and structural parameters directly relate the super-resolution parameters of a three-zone lateral super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design and fabrication of a three-zone lateral super-resolution pupil filter. The models established for GTe and STe have been used to analyze the effect of the fabrication errors of a pupil filter on its super-resolution property with a three-zone phase-only pupil filter as an example.