Article ID Journal Published Year Pages File Type
852983 Procedia Engineering 2016 4 Pages PDF
Abstract

The article is aimed at developing innovative primary transducer nanoscale material for semi-conductor sensors and investigating their surface physicochemical properties. Zink selenide nanofilms were obtained by discrete thermal evaporation in vacuum. Adsorption properties of the given material for carbon oxide (II) and oxygen were studied by the piezoquartz microweighing. Zink selenide nanofilms applicability in gas analysis was investigated. Based on the obtained experimental data, CO micro-impurities sensor was developed, the laboratory tests passed successfully.

Related Topics
Physical Sciences and Engineering Engineering Engineering (General)
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