Low Power Closed-loop Driving Circuit for Piezoelectric Microscanners Based on Tuneable Capacitive Position Sensors

This paper presents an application specific integrated circuit (ASIC) for driving piezoelectric (PZT) resonant actuated microscanners with low power consumption based on embedded capacitive position sensors. The ASIC utilizes the advantages of low driving voltages offered by the PZT actuation mechanism and the well-established low power concepts for capacitive closed-loop driving circuits. For closed-loop operation of the displacement of the mirror-plate a pair of capacitances is embedded within the microscanner. The position signal of the mirror-plate is scalable. Measurement results of the system are presented, using the driving ASIC and a MEMS micro-mirror, demonstrating the competitiveness of the concept.