| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 855936 | Procedia Engineering | 2015 | 4 Pages |
Abstract
The work investigates alternative capacitive sensing topologies for microelectromechanical systems, that simultaneously enable large quasi-stationary sensitivity, comparable to parallel-plates configuration, and large quality (Q) factor. In agreement with the model predictions, about 3-fold larger Q factor and 2-fold larger resonant sensitivity are obtained on the optimized geometry.
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