Multi-cantilever Oscillator

In this work we present a full integrated self-sustained multi-cantilever system using AMS 0.35 μm CMOS technology. The resonances of the multi-cantilever system are detected through a transimpedance amplifier circuit with enough gain to use this system as an oscillator. The mass responsivity of the system is good enough to use it as a high sensitivity mass sensor and the ultimate mass resolution due to the thermal noise is low enough to enable the system to work at room temperature. The multi-cantilever system shows enhanced detectability due to a collaborative behavior between the mechanical coupled cantilevers. This fact along the self-sustained oscillator opens a way to design synchronized systems and differential mass sensing.