Periodically Structured Lamé Resonators as High Sensitivity Resonant Mass Sensors

In this work, the electromechanical characterization of periodically structured MEMS Lamé resonators is presented. The resonators are aimed at the development of high-sensitivity resonant mass sensors based on the microbalance principle. Periodic perforations in the resonator decrease its mass while increasing the exposed surface, which is available for mass grafting. As a consequence, the expected sensitivity is significantly increased. Theoretical values for the resonance frequencies, calculated with a simple equivalent material model, are computed and shown to be in very good agreement with the measured values.