| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 858167 | Procedia Engineering | 2014 | 4 Pages |
An experimental approach for the detection of harmful gases in presence of humidity has been applied for gas sensors based on p-type Cu-Al-Oxide thin films. The impact of deposition conditions on the surface, morphology and sensing properties of the semiconducting oxide thin films are investigated. Cu-Al-Oxide thin film with higher resistance can be applied as p-type resistive gas sensor for the detection of pollutant gases. Thin films were characterized by X-Ray Diffraction, scanning electron microscope, and Raman spectroscopy. We observed that inert atmosphere and deposition temperature play the important role to affect the structural and surface morphology of Cu-Al-Oxide thin films. Sensitivity of nanostructured thin films towards reducing and oxidizing gas are studied as a function of gas concentration and operating temperature.
