A CMOS Based Polysilicon Nanowire Biosensor Platform for Different Biological Targets

In this work, we demonstrate a promising polysilicon nanowire (poly-Si NW) biosensor platform. Several biomarkers, such as N-terminal prohormone brain natriuretic peptide (NT-proBNP), Low-density lipoprotein (LDL), Hemoglobin (Hb), and Hemoglobin A1C (HbA1c), for heart disease and diabetes are experimentally examined by the developed platform. Based on experimental results, the sensor responses of each biomarker is suitable for clinical diagnoses. Compared with conventional examination methods, using polysilicon nanowire biosensor not only reduce the inspection time but also economize the cost of diagnoses. Moreover, these implemented biosensor platform are made by a standard complementary metal-oxide-semiconductor (CMOS) process. Based on this technology, the developed devices can be easily integrated with different functional modules, such wireless and microfluidic systems. Therefore, this work demonstrates a good potential of CMOS based biosensor platform to accomplish the need of early diagnosis and point-of-care testing (POCT) system.