| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 859677 | Procedia Engineering | 2013 | 6 Pages |
Diamond-like carbon (DLC) coating with a microwave-excited high-density near plasma gave a considerably high deposition rate over 100 μm/h, which is 100 times larger than the conventional method (∼1 μm/h), together with a hardness over 10 GPa. In this work, in order to understand the characteristics of DLC film deposited at over 100 μm/h with microwave assistance, DLC films obtained by using DC plasma and microwave-excited high-density near plasma were compared from the viewpoints of deposition rate, hardness, atomic composition and friction properties. It was shown that the hardness of low-temperature (210 °C) tempered steel (SCM415, JIS) did not decrease after the DLC coating of 520 nm for 12 seconds by microwave-excited high-density near plasma even though the substrate temperature was increased up to 270 °C during coating. On the other hand, the hardness of the same substrate decreased from 700 Hv to 660 Hv after the DLC coating of 540 nm for 1200seconds by DC plasma with the same maximum temperature of 270 °C.
