Analysis and Design of a Homing Sensor System for a 2D Moving Platform with Nanometer Resolution

The nanotechnology field has been developing strongly in recent years and ultra-precision measuring systems are nowadays required. A new two-dimensional moving platform with 50x50 mm range of travel, nanometer resolution and sub micrometer accuracy is being designed by the authors in order to be integrated with an Atomic Force Microscope (AFM). In this work the definition, design and experimental characterization of a homing sensor system for this 2D moving platform is presented. The homing sensor system will allow the generation of an absolute reference for the 2D platform on the X-Y axis and in θz, rotation of the XY plane in the Z axis, defining an initial cero for the measuring system which is based on laser encoders.