Analysis of Resonant Mass Sensor with Nanotube-or Nanowire-array Over Two-Dimensional Electron Gas

This paper deals with a resonant mass sensor in which resonant-frequency shift of vibrating nanotubes (NT) caused by loading of the sensing mass is detected as a frequency shift of the peak amplitude of the output source–drain current flowing along the two-dimensional electron gas (2DEG) channel. An array of vibrating suspended nanotubes can be treated as a membrane. The developed analytical model is used to calculate spatial potential distribution created by NT-array, resistance of the 2DEG-channel and frequency-dependent peak amplitude of output current. It is demonstrated that the peak amplitude of the output source-drain current increases with increasing number of the NTs, as expected.