Deep-Brain Silicon Multielectrodes for Simultaneous Neural Recording and Drug Delivery

Silicon micromachined deep brain multielectrodes (up to 70 mm) with monolithically integrated microfluidic channels have been realized to perform simultaneous electrical recording and drug delivery in deep brain regions. Fabrication process of the drug delivery channels and the Pt recording sites is demonstrated. Electrical characterization, impedance tuning and in-vivo testing of the developed probes are also presented. The functionality of the buried microfluidic channel is verified and pressure-flow characteristic of the channel is established.