High Sensitive Mass Detection using Piezoelectric Coupled Microcantilevers

This paper demonstrates the improvement of mass detection sensitivity using a new method of analysis applied to a piezoelectric coupled sensor. First, we prove the performances of an original method of analysis, based on the structures resonance amplitude, which significantly increases the mass detection sensitivity and improves the response time. Second, we show the advantage of coupled microcantilevers with a piezoelectric detection, that leads to a relative voltage variation of 8%/0.1 fg in the range [1 zg, 0.1 fg] versus an interferometric measurement. That opens the door to an ultrasensitive detection of highly diluted analytes in biological fluids.