Synthesis of WO3 Nanorod based Thin Films for Ethanol and H2 Sensing

WO3 nanorod based thin films were deposited via pulsed laser deposition onto conductometric transducers employing the shortest wavelength (193 nm) ArF excimer laser. Micro-characterization techniques such as SEM and XRD were employed to study surface morphology and crystal structure. It was observed that the fabricated films showed nanocolumnar features perpendicular to the surface. Gas sensing characterizations of the developed sensors were tested towards hydrogen and ethanol at temperature between room and 400°C. The sensor exhibited high response towards H2 and ethanol at operating temperatures of 170 and 400°C, respectively.