In2o3 Thinfilm Analysis by Low Temperature Atomic Force Microscope

Scanning Probe Microscopy (SPM) define a broad group of instruments used to image and measure properties of material, chemical and biological surfaces. Despite the success of SPM, it has some limitation. Because it uses the tunneling current between a biased tip and a sample as the feedback signal, it requires that the sample must be electrically conductive. Also it is difficult to achieve high-resolution images with AFM. The solution to this limitation is to maintain cryogenic temperature for the sample. The cryogenic AFM appears to be the most promising approach, because it will work on all macromolecules. Lowering the sample temperature will increase the mechanical stability of the molecules and will decrease its thermal induced motion. Lower temperature will reduce the thermal induced motion of the cantilever and also the overall noise of the instrument. Lowering the sample temperature up to 137K will decrease RMS area and surface roughness. In2O3 thin film has been used as a sample. Low temperature has been providing by liquid nitrogen container. To avoid condensation on the tip of AFM as well as on the sample Vacuum chamber has been provided. The entire set up must be isolated from surrounding vibration that can damage the tip of AFM. RMS roughness area of In2O3 thin film decreases from 13.682 nm to 1.984 nm and also line roughness from 2.889 nm from 1.443 nm. The films exhibit a finer microstructure