Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope

This paper presents an analysis of the acceleration output (sensitivity) in frequency decoupled MEMS tuning fork gyroscopes (TFG). We found that in-phase acceleration input is transduced into excitation of anti-phase mode, which results into acceleration output. Therefore, frequency decoupling (decoupling ratio, DR) of in- and anti-phase modes of sense resonators is key factor to suppress acceleration output in TFG, which was verified in a fully operating tuning fork gyroscope. The FEA simulation results showed that as DR increases, the acceleration output decreased from 73.56deg/s/g to 23.42deg/s/g.