| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 862526 | Procedia Engineering | 2011 | 7 Pages |
Abstract
Capacitive MEMS device forms a key building block for many applications, including sensors, RF applications, user interface technologies, transducers, MEMS displays. In this paper, some important concepts of capacitive MEMS reliability physics will be discussed along with the methodology to evaluate it. Packaging effects will also be covered, as investigated under controlled environment in a dedicated vacuum chamber.
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