| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 862577 | Procedia Engineering | 2011 | 4 Pages |
Abstract
The paper addresses a resonant sensor with array of micromachined cantilevers oscillating over the channel of highelectron-mobility transistor (HEMT)-like structure and controlling source-drain current flowing along it. Electrical readout is realized by direct modulation of the electric current by vibrating cantilevers. Simple analytical model accounting for the impact of electric field fringing on the output performance of the resonant sensor under consideration is developed.
Related Topics
Physical Sciences and Engineering
Engineering
Engineering (General)
