Characterization and gas sesing properties of intrinsic and Au-doped WO3 nanostuctures deposited by AACVD technique

Aerosal Assisted Chemical Vapour Deposition (AACVD) was implemented to grow WO3 layers with nanoneeddle-like morphology onto gas sensor alumina substrates from a W(OPh)6 precursor. A variety fo solvents and deposition temperatures in a range of 350 ∘C and 500 ∘C were used in order to find th eoptimal deposition conditions. The obtained WO3 structure was doped with gold particles by rf sputtering. The WO3 gas sensor based on nanoneedles showed high selectivity against to NO2. The sensing properites of WO3 nanoneedle-like structure, as well as influence of gold doping in their sensing properties were examined in this work.