Design and Construction of 2.45 GHz Microwave Plasma Source at Atmospheric Pressure

In this paper, we have designed and constructed the simple microwave plasma source (MPS) at atmospheric pressure in laboratory scale. A 2.45 GHz magnetron tube from a commercial microwave oven was utilized as the microwave source. Two types of MPS system were presented. MPS type I consists of magnetron tube connected to waveguide, a 3-stub tuner, a simple plasma torch region and a shot plunger. The MPS type II consists of magnetron tube and a tapered waveguide. The magnetron power supply for these systems was constructed. The measurement of the microwave power output was obtained by using calorimetric method. We can easily generate plasma at atmospheric pressure with argon as a plasma gas by using an auxiliary igniter. The plasma system is simple, compact and economical.