| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 867317 | Biosensors and Bioelectronics | 2012 | 6 Pages |
Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics.
► FBARs supporting simultaneously two fundamental resonant modes have been fabricated. ► The two modes exhibit opposite reactions to temperature and mass loading. ► They distinguish frequency changes due to a mass load or temperature variation. ► They were shown to be ideal for gravimetric biosensing. ► They eliminate the need for additional temperature-reference systems.
