Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8955247 | Applied Surface Science | 2019 | 28 Pages |
Abstract
Amorphous carbon nitride (a-CNx) thin films were deposited on graphite substrate at different angular positions using a low energy (up to 4.9â¯kJ) Mather-type plasma focus device. The deposition processes were carried out during 20 focus shots at optimum nitrogen gas pressure of 0.4â¯mbar. The formation of amorphous carbon nitride was confirmed by Raman Spectroscopy, SEM, EDX, FTIR, and XRD analyses. The intensity ratio of D and G peaks (ID/IG) recorded by Raman Spectroscopy showed two distinct trends at various angular positions. The sample deposited at 30° had the highest ID/IG ratio and correspondingly the highest sp3 CHx content in FTIR spectrum. Samples with lower ID/IG ratio appeared with smaller grain size and more smooth surfaces in SEM images. The highest CN intensities in FTIR spectrum belonged to those samples deposited at 30 and 75° angular positions.
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Physical and Theoretical Chemistry
Authors
F.M. Aghamir, A.R. Momen-Baghdadabad, M. Etminan,