| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9566999 | Applied Surface Science | 2005 | 6 Pages |
Abstract
In this paper, an improved mechanical device for producing a large angular movement of an optical element is described. The device can be used either for angular positioning or as a dynamic angular deflecting driver for optical components or systems. The device was designed using graph-presentation methods and numerical finite element method (FEM). The device was fabricated and tested as an angular driver of thin-film tilt interference filter for dense-wavelength division demultiplexing systems (DWDM) applications. Scaling-down analysis was carried out to show micro-electro-mechanical-systems (MEMS) suitability.
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Physical and Theoretical Chemistry
Authors
S. Eliahou-Niv,