Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9567099 | Applied Surface Science | 2005 | 5 Pages |
Abstract
We have investigated some aspects of the behaviour of planar Langmuir probes in the supersonic plasma flow produced by laser ablation of solid materials in vacuum. The ablation was done using a 26Â ns, 248Â nm excimer laser, irradiating a silver target at 1Â JÂ cmâ2. We have compared the behaviour of the probe when it is orientated perpendicular and parallel to the plasma flow. In particular, we have shown that it is possible to adapt an analytical model, developed for plasma immersion ion implantation, to quantitatively describe the variation of the ion current with probe bias for the case when the plasma flow is along the probe surface. The electron temperature was also measured.
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Authors
B. Doggett, C. Budtz-Joergensen, J.G. Lunney, P. Sheerin, M.M. Turner,