Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9567283 | Applied Surface Science | 2005 | 4 Pages |
Abstract
Ordered mesoporous silica films using Brij-76 surfactant were prepared from self-assembly of organic-inorganic species and their electrical/mechanical properties were investigated for low-k application. X-ray diffraction pattern revealed highly textured pore structure. Adequate dielectric properties could be realized by controlling the chemical species of silica wall. Porosity of mesoporous silica film was 39 ± 2% and elastic modulus and hardness of the film were 14.4 and 1.25 GPa, respectively. The dielectric constant and leakage current density were measured as 2.55 and less than 2 Ã 10â6 A/cm2 up to 1.6 MV/cm, respectively.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Sang-Bae Jung, Choo-Kyung Han, Hyung-Ho Park,