Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9567356 | Applied Surface Science | 2005 | 4 Pages |
Abstract
ZnO thin films were formed by oxidation of ZnS films on Si substrates. Sb doping of ZnO films was tried by laser irradiation of ZnO deposited with Sb. Although p-type ZnO:Sb film was not obtained, it was observed that the laser irradiation increased the near-ultraviolet (NUV) emission intensity, whereas the visible emission of oxygen vacancies decreased. Moreover, the resistance of the laser-irradiated ZnO:Sb films was higher than that of films without irradiation. These results show that Sb compensates the oxygen vacancy; as a result, the electrons are neutralized by holes generated by the dopant (Sb).
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
K. Ohara, T. Seino, A. Nakamura, T. Aoki, H. Kominami, Y. Nakanishi, Y. Hatanaka,